作者：何建建 孙以材 潘国峰

单位：河北工业大学   天津   300130

中图分类号：TP212.1   

文献标识码：A    

文章编号：1006-883X（2009）04-0018-04

摘 要：本文探讨了一种金属薄膜高温压力传感器的力敏电阻条的制作方法，采用 AlN 作铜衬底和金属力敏电阻条之间的电绝缘层，利用铜金属在高温条件下也能够表现出压阻特性，制作力敏电阻条。通过直流磁控溅射制作力敏电阻条，并引线，封装，进行测试，最后反应出随压力的变化电阻的变化关系。

关键词：压力传感器；引线；直流磁控溅射；力敏电阻

Fabrication of force-sensitive resistor strip for high temperature pressure sensor

HE Jian-jian, SUN Yi-cai, PAN Guo-feng

(Hebei University of Technology, Tianjin  300130, China)

Abstract: The fabrication method of the force-sensitive resistor strip for the metal thin film pressure sensor used in high temperature is discussed in this paper. AlN is used as insulation layer between copper substrate and force-sensitive metal resistor strip. Then the copper metals force-sensitive speciality that copper metal can still display the piezoresistance characteristic even under the high temperature condition is taken advantage of . The force-sensitive resistor strip is made by DC magnetron sputtering method and is lead, packaged, test subsequently. The resistance curve changing with the pressure changes is obtained in the end .

Keywords: pressure sensor; high temperature welding; DC magnetron reactive sputtering; mounting technique

阅读全文

备注：2009年  第15卷  第4期