注：国家高技术研究发展计划(863)新材料领域课题资助（项目编号：2009AA03Z413）

作者：王仕超 张晓霞 周勇 王祥斌 陈沛然 冷洁

单位：电子科技大学光电信息学院  四川成都 610054

中图分类号：TP212.1     

文献标识码：A    

文章编号：1006-883X（2009）04-0010-04

摘要:集成光学压力传感器利用幅度、相位、折射率分布、光程和光波极化方式的改变来感应外部压力。设计了马赫-曾德尔干涉仪(MZI)型微型光机电系统(MOEMS)压力传感器，探讨了工作原理，分析了弹性薄膜尺寸对应力的影响和波导中TE、TM模式的光对波导折射率的影响。通过设计弹性薄膜的尺寸和选用特定波长的单模激光，得到传感器的工作特性。

关键词：马赫-曾德尔干涉仪(MZI)；压力传感器；折射率；相位；微型光机电系统(MOEMS)

Research on Mach-Zehnder interferometer for MOEMS pressure sensor

WANG Shi-chao, ZHANG Xiao-xia, ZHOU Yong, WANG Xiang-bin, CHEN Pei-ran, LENG Jie

(School of Opto-Electronic Information, UESTC, Chengdu, Sichuan  610054, China)

Abstract: Integrated optical pressure sensor can sense external pressure by utilizing the changes of amplitude, phase,  refractive index distribution, optical path length or polarization way of lightwave. A micro-opto-electromechanical system(MOEMS) pressure sensor based on Mach-Zehnder interferometer(MZI) is designed and the operation principle is presented in this paper. The influence on stress  made by diaphragm size  and  that on refractive index made by light in TE or TM modes are analyzed. The excellent characteristics of  the sensor are obtained by correct choices  of  elastic membrane parameters and single mode laser with special wavelength.

Keywords: Mach-Zehnder interferometer(MZI); pressure sensors;  refractive index; phase;micro-opto-electromechanical system(MOEMS)

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备注：2009年  第15卷  第4期